Measurement of film thickness by electron microprobe analyzer

Chopra, K. L. ; Randlett, M. R. ; Bender, S. L. (1968) Measurement of film thickness by electron microprobe analyzer Review of Scientific Instruments, 39 (11). pp. 1755-1756. ISSN 0034-6748

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Official URL: http://rsi.aip.org/resource/1/rsinak/v39/i11/p1755...

Related URL: http://dx.doi.org/10.1063/1.1683224

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Item Type:Article
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