Chopra, K. L. ; Randlett, M. R. (1966) Modular electron beam source for thin film deposition Review of Scientific Instruments, 37 (10). pp. 1421-1422. ISSN 0034-6748
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Official URL: http://rsi.aip.org/resource/1/rsinak/v37/i10/p1421...
Related URL: http://dx.doi.org/10.1063/1.1720010
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| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to American Institute of Physics. |
| ID Code: | 76399 |
| Deposited On: | 31 Dec 2011 14:40 |
| Last Modified: | 31 Dec 2011 14:40 |
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