Study of thin film multilayers using X-ray reflectivity and scanning probe microscopy

Abstract

We have presented new schemes to analyse grazing incidence specular X-ray reflectivity data to obtain structural and chemical information of thin films. Analysis of specular reflectivity data gives information along the depth of the film, whereas, analysis of non-specular data reveals the structural information across the film surface and interfaces. The schemes proposed are based on the Born approximation and the distorted wave born approximation (DWBA). Surface structural parameters such as, height-height correlation and roughness exponent of the film obtained from the analysis of X-ray reflectivity was compared with results obtained from atomic force microscopy.