Rozati, S. M. ; Mirzapour, S ; Takwale, M. G. ; Marathe, B. R. ; Bhide, V. G. (1994) Influence of annealing on evaporated indium oxide thin films Materials Chemistry and Physics, 36 (3-4). pp. 252-255. ISSN 0254-0584
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Official URL: http://linkinghub.elsevier.com/retrieve/pii/025405...
Related URL: http://dx.doi.org/10.1016/0254-0584(94)90038-8
Abstract
Transparent conducting films of In2O3 have been prepared by the electron beam evaporation technique (EBET) at a substrate temperature of -25°C. As-deposited films are dark in colour. Subsequent heat treatment of these films in air resulted in crystallization of all films. In order to obtain more insight into the annealing phenomenon, three series of heat treatments were performed. The physical properties resulting from each series are discussed.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to Elsevier Science. |
| ID Code: | 5060 |
| Deposited On: | 18 Oct 2010 05:19 |
| Last Modified: | 19 May 2011 04:50 |
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