Photoemission study of porous silicon

Roy, A. ; Chainani, A. ; Sarma, D. D. ; Sood, A. K. (1992) Photoemission study of porous silicon Applied Physics Letters, 61 (14). pp. 1655-1657. ISSN 0003-6951

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Official URL: http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arn...

Related URL: http://dx.doi.org/10.1063/1.108442

Abstract

We report x-ray photoelectron spectra from a porous silicon film (PSF) with a photoluminescence peak at 1.8 eV, as a function of argon ion etching time to probe the composition in the surface and the subsurface regions. The results clearly indicate that the surface layer is essentially a fluorine admixed SiO2 phase, while the Si:O:F composition of the subsurface region 2:1:0.2. With the possibility of the existence of hydrogen in this composition it appears that beyond the highly oxidized surface, PSF is a fluorine substituted siloxene derivative, which can be responsible for the visible photoluminescence.

Item Type:Article
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ID Code:46374
Deposited On:04 Jul 2011 11:41
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