Kale, Nitin S. ; Joshi, Manoj ; Nageswara Rao, P. ; Mukherji, S. ; Ramgopal Rao, V. (2009) Bio-functionalization of silicon nitride-based piezo-resistive microcantilevers Sadhana (Academy Proceedings in Engineering Sciences), 34 (4). pp. 591-597. ISSN 0256-2499
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Official URL: http://www.ias.ac.in/sadhana/Pdf2009Aug/591.pdf
Related URL: http://dx.doi.org/10.1007/s12046-009-0036-7
Abstract
Methods of bio-functionalize silicon nitride involve process steps to convert it into an oxynitride via plasma implantation techniques. Such methods can potentially damage microstructures such as cantilevers. In this paper, we report successful bio-functionalization of Hotwire CVD silicon nitride-based piezo-resistive cantilevers without any oxygen plasma treatment. Process to fabricate such structures and to bio-functionalize them is discussed in detail.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to Indian Academy of Sciences. |
| Keywords: | Hotwire CVD; Microcantilever; Antibody; Piezo-resistive; Immobilization; Silanization |
| ID Code: | 44482 |
| Deposited On: | 22 Jun 2011 05:32 |
| Last Modified: | 18 May 2016 01:08 |
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