Ramgopal Rao, V. ; Sharma, D. K. ; Vasi, J. (1996) Neutral electron trap generation under irradiation in reoxidized nitrided gate dielectrics IEEE Transactions on Electron Devices, 43 (9). pp. 1467-1470. ISSN 0018-9383
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Official URL: http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arn...
Related URL: http://dx.doi.org/10.1109/16.535335
Abstract
In this study we report for the first time results on neutral electron trap generation in reoxidised nitrided oxide dielectrics under various radiation doses and bias conditions and compare the results with the conventional oxides. We see very little electron trap creation in RNO dielectrics for radiation doses up to 5 Mrad (Si) and for bias fields up to ±2.5 MV/cm. We explain our results in RNO and oxide dielectrics using a three step defect creation model.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to IEEE. |
| ID Code: | 44437 |
| Deposited On: | 22 Jun 2011 03:48 |
| Last Modified: | 22 Jun 2011 03:48 |
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