Malshe, A. P. ; Ogale, S. B. ; Kshirsagar, S. T. ; Chari, K. S. (1991) Excimer laser-induced etching of non-hydrogenated (a-C) and hydrogenated (a-C:H) diamond-like carbon films: a comparative study Materials Letters, 11 (5-7). pp. 175-179. ISSN 0167-577X
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Official URL: http://linkinghub.elsevier.com/retrieve/pii/016757...
Related URL: http://dx.doi.org/10.1016/0167-577X(91)90075-H
Abstract
Pulsed excimer laser-induced dry etching of non-hydrogenated (a-C) and hydrogenated (a-C:H) diamond-like carbon (DLC) films is performed. It is shown that excimer laser etching rate of diamond-like a-C:H phase is much higher than a-C phase. It has also been demonstrated that the etching of the former phase is cleaner than the latter one. Investigations reveal the influencial role played by hydrogen in the etching process.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to Materials Research Society. |
| ID Code: | 26977 |
| Deposited On: | 08 Dec 2010 12:54 |
| Last Modified: | 11 Jun 2011 11:34 |
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