Effect of ultrasonic vibrations of the substrate on the growth of thin metal films

Chopra, K. L. ; Randlett, M. R. (1967) Effect of ultrasonic vibrations of the substrate on the growth of thin metal films Applied Physics Letters, 11 (6). pp. 202-203. ISSN 0003-6951

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Official URL: http://apl.aip.org/resource/1/applab/v11/i6/p202_s...

Related URL: http://dx.doi.org/10.1063/1.1755097

Abstract

Gold and silver films deposited on rock salt substrates ultrasonically agitated by a 6.5 Mc AT-cut vibrating quartz crystal exhibit enhanced agglomeration and orientation effects. The effect of the ultrasonic field on the growth of a film is essentially similar to that of an elevated substrate temperature.

Item Type:Article
Source:Copyright of this article belongs to American Institute of Physics.
ID Code:23222
Deposited On:25 Nov 2010 13:17
Last Modified:28 May 2011 10:24

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