Annealing effects on transition temperature of r.f. sputtered Bi-Sr-Ca-Cu-O thin films

Misra, Vinita ; Rao, V. V. ; Chopra, K. L. (1991) Annealing effects on transition temperature of r.f. sputtered Bi-Sr-Ca-Cu-O thin films Microelectronics Reliability, 31 (6). pp. 1279-1281. ISSN 0026-2714

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Official URL: http://linkinghub.elsevier.com/retrieve/pii/002627...

Related URL: http://dx.doi.org/10.1016/0026-2714(91)90318-2

Abstract

High-Tc Bi-Sr-Ca-Cu-O thin films have been made on YSZ substrates by single-target r.f. sputtering. The target was prepared for a composition of Bi4Sr3Ca3Cu4Ox. The best film showed the onset of superconductivity at 83 K and zero resistance at 75 K. The dependence of Tc(o) of sputtered films on annealing conditions is studied in detail.

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