Characterization of nickel-copper multilayer and copper thin film using neutron reflectivity measurements

Vedpathak, Mahesh ; Basu, Saibal ; Kulkarni, S. K. (1997) Characterization of nickel-copper multilayer and copper thin film using neutron reflectivity measurements Applied Surface Science, 115 (4). pp. 311-316. ISSN 0169-4332

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Official URL: http://linkinghub.elsevier.com/retrieve/pii/S01694...

Related URL: http://dx.doi.org/10.1016/S0169-4332(97)00162-1

Abstract

The use of neutron reflectivity measurement for characterizing thin films has become an important non-destructive tool. We have done a systematic characterization study of 'Corning 7059' glass substrate, a copper film and a nickel-copper multilayer deposited on this substrate by electron beam evaporation, using a neutron reflectivity measurement set-up, designed by us, on an existing spectrometer in DHRUVA reactor, Trombay, India. We have been able to characterize thicknesses of the layers with reasonable accuracy. Also we could detect a thin oxide layer on copper and interdiffusion at copper-nickel interfaces, with the present instrumental resolution.

Item Type:Article
Source:Copyright of this article belongs to Elsevier Science.
Keywords:Neutron; Reflectivity; Thin Film; Multilayer
ID Code:17980
Deposited On:17 Nov 2010 13:24
Last Modified:04 Jun 2011 08:55

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