Lowering of thickness of boron-doped microcrystalline hydrogenated silicon film by seeding technique

Sarker, Arindam ; Banerjee, Chandan ; Barua, A. K. (2005) Lowering of thickness of boron-doped microcrystalline hydrogenated silicon film by seeding technique Solar Energy Materials and Solar Cells, 86 (3). pp. 365-371. ISSN 0927-0248

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Official URL: http://linkinghub.elsevier.com/retrieve/pii/S09270...

Related URL: http://dx.doi.org/10.1016/j.solmat.2004.08.005

Abstract

By using a seeding technique it has been possible to reduce the thickness of p-μc-Si:H film to 230 Å, with an improved electrical conductivity (0.93 S cm-1) and lower optical absorption compared to those of conventional p-μc-Si:H layers without a seed layer, for use at the tunnel junction and as the top layer of a double junction n-i-p structured a-Si solar cell. Undoped-μc-Si:H has been used as the seed layer. The layers were prepared by the radio frequency plasma-enhanced chemical vapour deposition (RF-PECVD) method (13.56 MHz) at 40 mW/cm2 rf power density and low substrate temperature (200ÅC). The ultrathin seed layer (~30 Å) enhances the growth of microcrystallinity of the p-type μc-Si:H film as confirmed by the results of transmission electron microscopy (TEM) analysis and Raman spectroscopy.

Item Type:Article
Source:Copyright of this article belongs to Elsevier Science.
Keywords:Microcrystallinity; Seed Layer; Tunnel Junction; Transmission Electron Microscopy (TEM); Raman Spectroscopy
ID Code:1638
Deposited On:05 Oct 2010 12:09
Last Modified:13 May 2011 09:22

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