Intrinsic hydrogenated microcrystalline silicon oxide films prepared by RF glow discharge

Das, D. ; Mandal, S. ; Barua, A. K. (1998) Intrinsic hydrogenated microcrystalline silicon oxide films prepared by RF glow discharge Journal of Materials Science Letters, 17 (24). pp. 2097-2100. ISSN 0261-8028

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Official URL: http://www.springerlink.com/index/X124P6878X123332...

Related URL: http://dx.doi.org/10.1023/A:1006688218232

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Item Type:Article
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ID Code:1626
Deposited On:05 Oct 2010 12:10
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