Indefinite admittance matrix of a five-layer thin-film integrated structure

Abstract

The advent of integrated electronic devices has aroused keen interest in the study of the properties of multilayer thin-film structure. A variety of network functions may be derived from the indefinite admittance matrix of a multiterminal multilayer structure. With the objective in view, the indefinite admittance matrix of a five-layer structure (consisting of three resistive layers separated from one another by two dielectric layers) governed by a second-order linear differential equation is evaluated taking into account the parasitic capacitances invariably present among the constituent layers.