Debnath, Sanjit K. ; Kothiyal, Mahendra P. ; Schmit, Joanna ; Hariharan, Parameswaran (2006) Spectrally resolved phase-shifting interferometry of transparent thin films: sensitivity of thickness measurements Applied Optics, 45 (34). pp. 8636-8640. ISSN 0003-6935
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Official URL: http://www.opticsinfobase.org/ao/abstract.cfm?URI=...
Related URL: http://dx.doi.org/10.1364/AO.45.008636
Abstract
Spectrally resolved white-light phase-shifting interference microscopy can be used for rapid and accurate measurements of the thickness profile of transparent thin-film layers deposited upon patterned structures exhibiting steps and discontinuities. We examine the sensitivity of this technique and show that it depends on the thickness of the thin-film layer as well as its refractive index. The results of this analysis are also valid for any other method based on measurements of the spectral phase such as wavelength scanning or white-light interferometry.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to Optical Society of America. |
| ID Code: | 13945 |
| Deposited On: | 12 Nov 2010 14:26 |
| Last Modified: | 16 Feb 2011 05:32 |
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