Collisionless sheath heating in current-driven capacitively coupled plasma discharges via higher order sinusoidal signals

Sharma, S ; Mishra, S K ; Kaw, P K ; Das, A ; Sirse, N ; Turner, M M (2015) Collisionless sheath heating in current-driven capacitively coupled plasma discharges via higher order sinusoidal signals Plasma Sources Science and Technology, 24 (2). 025037. ISSN 0963-0252

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Official URL: http://doi.org/10.1088/0963-0252/24/2/025037

Related URL: http://dx.doi.org/10.1088/0963-0252/24/2/025037

Abstract

Collisionless heating of the electrons in the vicinity of the sheath region corresponding to higher order sinusoidal signals in a current-driven radio-frequency capacitively coupled plasma discharge has been investigated analytically and further verified by particle-in-cell simulation. The simulation results for collisionless sheath heating are found to be in good agreement with analytical predictions. In contrast to the voltage driven case, it is demonstrated that a pure sinusoidal waveform gives maximum electron sheath heating with a current-driven configuration and the ion energy can be controlled by varying the pulse width.

Item Type:Article
Source:Copyright of this article belongs to IOP Publishing.
ID Code:135330
Deposited On:23 Jan 2023 03:32
Last Modified:23 Jan 2023 03:32

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