Optical flat surfaces: direct interferometric measurements of small-scale irregularities

Hariharan, Parameswaran (1996) Optical flat surfaces: direct interferometric measurements of small-scale irregularities Optical Engineering, 35 (11). pp. 3265-3266. ISSN 0091-3286

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Official URL: http://link.aip.org/link/?OPEGAR/35/3265/1

Related URL: http://dx.doi.org/10.1117/1.601065

Abstract

Some applications of optical surfaces place very stringent limits on small-scale surface irregularities, such as ripples. A method that can be used to make direct interferometric measurements of such small-scale irregularities is described.

Item Type:Article
Source:Copyright of this article belongs to International Society for Optical Engineering.
ID Code:12608
Deposited On:12 Nov 2010 15:40
Last Modified:12 Nov 2010 15:40

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