Singh, Pawan K. ; Singh, Kaushal K. ; Hofmann, Ralf ; Armstrong, Karl ; Krishna, Nety ; Mahapatra, Souvik (2008) Au nanocrystal flash memory reliability and failure analysis In: 2008 15th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2008, 7-11 July, 2008, Singapore, Singapore.
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Official URL: http://ieeexplore.ieee.org/document/4588190/
Related URL: http://dx.doi.org/10.1109/IPFA.2008.4588190
Abstract
In this work we investigate the memory performance and reliability of Au nanocrystal memory devices. We analyze the Au NC formation process and fabricate actual test wafers for electrical characterization. With reference to good Pt NC devices, poor performance of Au NC devices is investigated in detail by analytical and electrical methods.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Source: | Copyright of this article belongs to Institute of Electrical and Electronics Engineers. |
| ID Code: | 112627 |
| Deposited On: | 12 Apr 2018 08:06 |
| Last Modified: | 12 Apr 2018 08:06 |
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