Multilayer growth facilities and studies at IUC-DAEF: a review

Dasannacharya, B. A. (2001) Multilayer growth facilities and studies at IUC-DAEF: a review Vacuum: Surface Engineering, Surface Instrumentation & Vacuum Technology, 60 (4). pp. 377-383. ISSN 0042-207X

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Official URL: http://linkinghub.elsevier.com/retrieve/pii/S00422...

Related URL: http://dx.doi.org/10.1016/S0042-207X(00)00155-X

Abstract

Recently developed thin film and multilayer structure deposition facilities at IUC-DAEF, Indore Centre are discussed in the present paper. Using these facilities a number of single layer as well as multilayer systems were deposited and studied using various characterization techniques. Studies on some of these multilayer systems, viz. Nb-C, Fe-Ni, Nb-Fe and single-layer films of Ag, FeN and SiO2 are also presented.

Item Type:Article
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ID Code:10169
Deposited On:03 Nov 2010 04:02
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