Fabrication of submicron scale patterned plastic thin film fluidic devices with controllable thickness

Abstract

We present a soft-lithography based method to fabricate plastic thin film fluidic devices on glass and plastic substrates. Principles of soft-lithography and spin casting were used to generate the films. The thickness of these films is controllable and the patterns we have generated have submicron scale dimensions. By using commercially available compact disc (CD) components as molds, we have been able to generate parallel line and cross patterns on these thin films. These patterned films could be lifted from the substrates and further folded into rolls.