Ion-beam-induced embedded nanostructures and nanoscale mixing

Abstract

Megaelectron volts ion-induced effects for discontinuous gold nanoislands and for continuous gold films on silicon substrate have been studied. Irradiation was carried out with 1.5 MeV Au²⁺ ions at room temperature to various fluences. Cross-sectional transmission electron microscopy and Rutherford backscattering spectrometry are used to study the ion-beam mixing in Au/Si systems. At a fluence of 1× 10¹⁴ ions cm^-2, a material push-in effect and a metastable Au-Si phase formation have been observed for Au nanoislands, while no push in or mixing has been observed for the case of continuous films. The mixed phase of Au-Si system is found to be crystalline in nature. The material push- in and ion-beam mixing effects that are observed in case of nanoislands appear to be due to combined effect of capillary driving force, ion-induced viscous flow, and ion-induced energy spike effects.