X-ray scattering studies of multilayer interfaces

Sanyal, M. K. ; Sinha, S. K. ; Gibaud, A. ; Satija, S. K. ; Majkrzak, C. F. ; Homma, H. (1991) X-ray scattering studies of multilayer interfaces Materials Research Society Symposium Proceedings, 237 . p. 393. ISSN 0272-9172

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Official URL: http://journals.cambridge.org/action/displayAbstra...

Related URL: http://dx.doi.org/10.1557/PROC-237-393


The results of specular and diffuse X-ray scattering studies of multilayers are discussed. We show here that such studies can yield detailed statistical information about the interfacial roughness and morphology. Results on a GaAs/AlAs multilayer are presented and the data is analyzed within the Born approximation.

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