Prashanthi, K. ; Naresh, M. ; Seena, V. ; Thundat, T. ; Ramgopal Rao, V. (2011) A novel photoplastic piezoelectric nanocomposite for MEMS applications IEEE/ASME Journal of Microelectromechanical Systems, PP (99). pp. 1-3. ISSN 1057-7157
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Official URL: http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arn...
Related URL: http://dx.doi.org/10.1109/JMEMS.2011.2178118
Abstract
This letter reports a photoplastic (SU-8) piezoelectric (ZnO) nanocomposite route for realization of simple and low-cost piezoelectric microelectromechanical systems (MEMS). Integrating the ZnO nanoparticles into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of ZnO but also combines the photopatternability and the optical transparency of the SU-8 polymer. These two aspects, therefore, lead to exciting MEMS applications with simple photolithography-based microfabrication. This approach opens up many new applications in the field of both sensor and energy harvesting.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to IEEE. |
| ID Code: | 80925 |
| Deposited On: | 02 Feb 2012 14:30 |
| Last Modified: | 02 Feb 2012 14:30 |
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