Sachdev, R. ; Wijeratne, G. ; Ramgopal Rao, V. ; Viswanathan, C. R. (1998) A study of the effect of plasma etch damage on sub-micron MOSFET's flicker noise properties Technical Digest, 28th European Solid-State Device Research Conference (ESSDERC), Bordeaux, France . pp. 572-575.
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| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to Technical Digest, 28th European Solid-State Device Research Conference (ESSDERC), Bordeaux, France. |
| ID Code: | 79805 |
| Deposited On: | 28 Jan 2012 11:43 |
| Last Modified: | 28 Jan 2012 11:43 |
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