Ray, P. ; Rao, V. R. ; Apte, P. R. (2010) A 8-resistor SU-8 accelerometer with reduced cross axis sensitivity 2010 IEEE Asia Pacific Conference on Circuits and Systems (APCCS) . pp. 824-826.
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Official URL: http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumb...
Related URL: http://dx.doi.org/10.1109/APCCAS.2010.5775073
Abstract
The MEMS accelerometer has a high cross sensitivity due to proof mass being eccentric. This paper gives results for a SU-8 z-axis accelerometer that uses 8-resistor Wheatstone-bridge to reduce the x-axis and y-axis cross sensitivity by 2 orders of magnitude compared to the conventional 4-resistor Wheatstone-bridge arrangement.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to 2010 IEEE Asia Pacific Conference on Circuits and Systems (APCCS). |
| ID Code: | 79729 |
| Deposited On: | 28 Jan 2012 11:58 |
| Last Modified: | 28 Jan 2012 11:58 |
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