Ray, P. ; Rao, V. R. ; Apte, P. R. (2010) Optimum design of SU-8 based accelerometer with reduced cross axis sensitivity Proceedings of the 2010 IEEE International Conference on Semiconductor Electronics (ICSE) . pp. 289-292.
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Official URL: http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumb...
Related URL: http://dx.doi.org/10.1109/SMELEC.2010.5549364
Abstract
The work presented here shows a new design for SU8 based piezoresistive accelerometer, where SU8/carbon black is used as piezoresistors. The accelerometer structure is optimized to generate maximum bending stress at the base of the beams. The structure is inherently temperature insensitive. The design of proof mass is such that the sensitivity to cross axis acceleration is kept within a limit of 4%.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to Proceedings of the 2010 IEEE International Conference on Semiconductor Electronics (ICSE). |
| ID Code: | 79728 |
| Deposited On: | 28 Jan 2012 11:58 |
| Last Modified: | 28 Jan 2012 11:58 |
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