Structure of chromium thin films prepared by plasma deposition

Agarwal, Vandna ; Vankar, V. D. ; Chopra, K. L. (1988) Structure of chromium thin films prepared by plasma deposition Journal of Vacuum Science and Technology A, 6 (4). pp. 2341-2343. ISSN 0734-2101

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Official URL: http://avspublications.org/jvsta/resource/1/jvtad6...

Related URL: http://dx.doi.org/10.1116/1.575586

Abstract

The cubic A-15-type structure of chromium has been obtained by evaporating chromium at 673 K in the presence of ammonia plasma. The presence of N, NH, C, and CH species in the films suggests that the cubic A-15 structure is stabilized by these species. Deposition at Ts >773 K, or by annealing the as-deposited films at temperatures >773 K, the A-2 phase of chromium is obtained. The study of the transformation kinetics of the A-15 to the A-2 phase yields an estimate of activation energy 1.81 K cal mol-1.

Item Type:Article
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ID Code:76420
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