Rastogi, R. S. ; Vankar, V. D. ; Chopra, K. L. (1987) Simple planar magnetron sputtering source Review of Scientific Instruments, 58 (8). pp. 1505-1506. ISSN 0034-6748
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Official URL: http://link.aip.org/link/?RSINAK/58/1505/1
Related URL: http://dx.doi.org/10.1063/1.1139388
Abstract
The design and performance of a simple and efficient planar magnetron sputtering source using demountable targets are described. The design of the source enables sputtering of magnetic and nonmagnetic materials with equal ease.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to American Institute of Physics. |
| Keywords: | Performance; Design; Magnetrons; Cathode Sputtering; Deposition; Thin Films; Performance Testing; Evaluation; Copper; Electric Currents |
| ID Code: | 69125 |
| Deposited On: | 08 Nov 2011 11:09 |
| Last Modified: | 08 Nov 2011 11:09 |
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