Banerjee, A. ; Barthwal, S. K. ; Chopra, K. L. (1976) Design of a bent beam electron gun for evaporation Review of Scientific Instruments, 47 (11). p. 1410. ISSN 0034-6748
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Official URL: http://rsi.aip.org/resource/1/rsinak/v47/i11/p1410...
Related URL: http://dx.doi.org/10.1063/1.1134538
Abstract
This note describes the design and fabrication of a simple 6 kW bent beam electron gun for vacuum deposition of thin films.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to American Institute of Physics. |
| ID Code: | 69100 |
| Deposited On: | 08 Nov 2011 10:36 |
| Last Modified: | 08 Nov 2011 10:36 |
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