Sensitiviy of a nanocantilever-based mass sensor

Prabakar, K. ; Jayapandian, J. ; Tyagi, A. K. ; Sundar, C. S. ; Baldev Raj, (2010) Sensitiviy of a nanocantilever-based mass sensor Nano, 5 (1). pp. 25-30. ISSN 1793-2920

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Official URL: http://www.worldscinet.com/nano/05/0501/S179329201...

Related URL: http://dx.doi.org/10.1142/S1793292010001834

Abstract

In the present work, mass and position sensitivity of a nanocantilever is simulated using finite element analysis. Changes in resonant frequency of various modes of a polysilicon cantilever, with a gold coating of different thickness, area, and spatial distribution is simulated. It is found that for a uniform increase in gold coating thickness, torsional mode gives an order higher mass sensitivity than vertical bending and lateral bending modes. In other cases, sensitivity is highly dependent on the position of the coating and is explained on the basis of flexural rigidity. Apart from this, simulations were performed for a point mass (gold cube) loading at various positions along the length and width axis of the cantilever. Further, for localized mass loading, cantilever was tailored for enhanced sensitivity. It is found that by introducing a step discontinuity in thickness of the cantilever, the mass sensitivity increases by two orders of magnitude and it depends on the position of step from free end, step thickness, and step width.

Item Type:Article
Source:Copyright of this article belongs to World Scientific Publishing Company.
Keywords:Nanocantilever; Mass and Positional Sensitivity; Finite Element Analysis
ID Code:53270
Deposited On:05 Aug 2011 10:39
Last Modified:05 Aug 2011 10:39

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