Deposition of aluminum-doped zinc oxide thin films by spray pyrolysis

Goyal, Devendra ; Solanki, Parag ; Marathe, Balkrishna ; Takwale, Murlidhar ; Bhide, Vishnu (1992) Deposition of aluminum-doped zinc oxide thin films by spray pyrolysis Japanese Journal of Applied Physics, 31 . pp. 361-364. ISSN 0021-4922

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Official URL: http://jjap.ipap.jp/link?JJAP/31/361/

Related URL: http://dx.doi.org/10.1143/JJAP.31.361

Abstract

Aluminum-doped zinc oxide films were prepared on Corning 7059 by an inexpensive spray pyrolysis technique. Variation in structural, electrical and optical properties with doping concentration is investigated in detail. The films were highly transparent to the visible radiation and electrically conductive. X-ray diffraction results show that all films were polycrystalline in nature with preferred orientation. Texture coefficient and grain size were calculated along the direction for all films with different doping concentrations. Carrier concentration and mobility values were determined by measuring the Hall voltage at room temperature. Good correlation between structural and electrical properties was found.

Item Type:Article
Source:Copyright of this article belongs to Institute of Pure and Applied Physics.
Keywords:Spray Pyrolysis; ZnO; Texture Coefficient
ID Code:5087
Deposited On:18 Oct 2010 05:07
Last Modified:19 May 2011 05:03

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