A novel dry method for surface modification of SU-8 for immobilization of biomolecules in Bio-MEMS

Joshi, Manoj ; Kale, Nitin ; Lal, Rakesh ; Ramgopal Rao, V. ; Mukherji, Soumyo (2007) A novel dry method for surface modification of SU-8 for immobilization of biomolecules in Bio-MEMS Biosensors and Bioelectronics, 22 (11). pp. 2429-2435. ISSN 0956-5663

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Official URL: http://linkinghub.elsevier.com/retrieve/pii/S09565...

Related URL: http://dx.doi.org/10.1016/j.bios.2006.08.045


SU-8 has been primarily used for structural elements and microfludics components in MEMS. Microsystems for biological applications require immobilization of biomolecules on the MEMS structures. In order to functionalize SU-8 for such purposes, the surface needs to be modified. In this paper, we report a novel dry method of surface modification of SU-8 which is compatible with standard microfabrication techniques. The surface obtained by spin coating SU-8 (2002) on silicon wafer was modified by grafting amine groups using pyrolytic dissociation of ammonia in a hotwire CVD setup. To demonstrate the presence of amine groups on modified SU-8 surface, the surface characteristic after modification was assessed using Fourier transform infrared spectroscopy. The change in SU-8 surface morphology before and after surface modification was investigated using atomic force microscopy. To show the utility of this process for application in Bio-MEMS, SU-8 microcantilevers were fabricated and subjected to the same surface modification protocol. Following this, the cantilevers were incubated first in a suspension of human immunoglobulin (HIgG) and then in FITC tagged goat anti-human IgG in order to demonstrate the utility of the surface modification performed. The efficacy of the process was assessed by observing the cantilevers under a fluorescence microscope.

Item Type:Article
Source:Copyright of this article belongs to Elsevier Science.
Keywords:Bio-MEMS; Hot Wire CVD; Microcantilevers; SU-8; Surface Modification
ID Code:41563
Deposited On:30 May 2011 09:14
Last Modified:17 May 2016 23:14

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