A novel technique for microfabrication of ultra-thin affinity cantilevers for characterization with an AFM

Joshi, Manoj ; Ramgopal Rao, V. ; Mukherji, Soumyo (2010) A novel technique for microfabrication of ultra-thin affinity cantilevers for characterization with an AFM Journal of Micromechanics and Microengineering, 20 (12). p. 125007. ISSN 0960-1317

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Official URL: http://iopscience.iop.org/0960-1317/20/12/125007

Related URL: http://dx.doi.org/10.1088/0960-1317/20/12/125007

Abstract

A novel, low-cost microfabrication technique for ultra-thin affinity cantilevers to be characterized using an atomic force microscope (AFM) has been demonstrated. Compared to its counterparts reported in the literature, it does not involve a double-sided aligner or deep reactive ion etching (DRIE). Such a microfabrication technique incorporates features like elimination of stiction during the wet release of cantilevers thereby increasing the process yield. It also eliminates the need for laser dicing and allows processing of a large number of cantilevers simultaneously for surface functionalization. Uses of these cantilevers for estimation of the mechanical properties of thin films as well as biosensor applications are demonstrated.

Item Type:Article
Source:Copyright of this article belongs to Institute of Physics.
ID Code:41556
Deposited On:30 May 2011 09:00
Last Modified:30 May 2011 09:00

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