A simple microwave method for monitoring the conductivity of semiconductor epitaxial layers

Nag, B. R. ; Ghosh, G. ; Dhar, S. (1992) A simple microwave method for monitoring the conductivity of semiconductor epitaxial layers Solid State Electronics, 35 (12). pp. 1823-1826. ISSN 0038-1101

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Official URL: http://linkinghub.elsevier.com/retrieve/pii/003811...

Related URL: http://dx.doi.org/10.1016/0038-1101(92)90267-G

Abstract

A simple microwave method is described for monitoring the conductivity of epitaxial layers grown on insulating or conducting substrates. Experimental results are given to illustrate the suitability of the method.

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ID Code:28714
Deposited On:15 Dec 2010 11:41
Last Modified:08 Jun 2011 07:08

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