Sunil, D. ; Vankar, V. D. ; Chopra, K. L. (1991) Infrared and ellipsometric studies of amorphous hydrogenated carbon films Journal of Applied Physics, 69 (6). pp. 3719-3722. ISSN 0021-8979
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Official URL: http://jap.aip.org/resource/1/japiau/v69/i6/p3719_...
Related URL: http://dx.doi.org/10.1063/1.348464
Abstract
Amorphous hydrogenated carbon films have been deposited on a powered electrode by decomposition of acetylene in an rf discharge. Infrared and spectroscopic ellipsometry have been used to study the bonding characteristics and optical properties of these films. The films possess a mixture of bonding configurations which are very sensitive to discharge conditions. Large changes in refractive index and extinction coefficients have been observed. These changes are associated with ion-induced structural modifications and hydrogen incorporation during the deposition process.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to American Institute of Physics. |
| Keywords: | Carbon; Hydrogenation; Ellipsometry; Infrared Spectra; Chemical Vapor Deposition; Refracitivity; Microstructure; Sample Preparation |
| ID Code: | 23158 |
| Deposited On: | 25 Nov 2010 13:23 |
| Last Modified: | 28 May 2011 04:44 |
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