Experimental determination of the thermal conductivity of thin films

Abstract

Two techniques have been developed to determine experimentally the thermal conductivity of thin solid films of thickness 500 Å or more at low and high temperatures. The first technique is a steady state and is suitable for measurements above room temperature. The method enables the thermal conductivity of eight film specimens to be measured simultaneously. The second technique is a transient one (an adaptation of Ioffe's method for bulk materials) and is suitable for measurements in the temperature range 100-260 K. The two techniques have been used to make measurements of thin films of copper and various crystalline and amorphous semiconductors. The values of the thermal conductivity for thick copper films by both techniques agree quite well with the bulk values.