Deposition of polyphenylene sulphide (PPS) polymer by pulsed excimer laser ablation

Kale, Sangeeta ; Ogale, S. B. ; Jog, J. P. ; Nadkarni, V. M. (1992) Deposition of polyphenylene sulphide (PPS) polymer by pulsed excimer laser ablation Materials Letters, 15 (4). pp. 260-263. ISSN 0167-577X

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Official URL: http://linkinghub.elsevier.com/retrieve/pii/016757...

Related URL: http://dx.doi.org/10.1016/0167-577X(92)90081-T

Abstract

Thin films of polyphenylene sulphide (PPS) polymer have been deposited by pulsed excimer laser ablation. The depositions were carried out on (100) Si substrates held either at room temperature or at 90°C. The films deposited at room temperature were annealed at different temperatures up to a maximum of 90°C. In all cases the films were characterized using the techniques of spectroscopic ellipsometry, low-angle X-ray diffraction and IR transmission.

Item Type:Article
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ID Code:22598
Deposited On:24 Nov 2010 08:11
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