Excimer laser ablated lead zirconate titanate thin films

Roy, D. ; Krupanidhi, S. B. ; Dougherty, J. P. (1991) Excimer laser ablated lead zirconate titanate thin films Journal of Applied Physics, 69 (11). pp. 7930-7932. ISSN 0021-8979

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Official URL: http://jap.aip.org/resource/1/japiau/v69/i11/p7930...

Related URL: http://dx.doi.org/10.1063/1.347486


Lead zirconate titanate (PZT) thin films on platinum coated silicon were prepared by excimer laser ablation and were crystallized by subsequent annealing. Films deposited at various fluences and post-annealed showed slight variations in lead content which seemed to affect the orientation. The relatively lead rich films showed (110) orientation and the orientation changed to (111) as the Pb content decreased. Crystalline perovskite PZT films showed a dielectric constant of 800, a remnant polarization of 32 µ C/cm2 and a coercive field of 130 kV/cm.

Item Type:Article
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ID Code:18765
Deposited On:17 Nov 2010 12:26
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