Komath, Manoj ; Zambare, Madhukar ; Gangal, S. A. ; Kulkarni, S. K. (1994) R.f. plasma-assisted deposition of diamond-like carbon films from methanol-water vapour mixture Diamond and Related Materials, 4 (1). pp. 15-19. ISSN 0925-9635
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Official URL: http://linkinghub.elsevier.com/retrieve/pii/092596...
Related URL: http://dx.doi.org/10.1016/0925-9635(94)90063-9
Abstract
Carbon films have been deposited in a parallel-plate r.f. CVD reactor using methanol-water vapour mixture as precursor, without any carrier or diluent gas. The various characterization tests showed that the films obtained at the optimum experimental conditions are typical DLC material. The notable feature of the experiment is that factors such as complexity of the set-ups, safety measures against hazards and costly precursor/carrier gases are avoided. This demonstration appears to be a positive step towards the more economical and convenient synthesis of DLC.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to Elsevier Science. |
| Keywords: | Diamond-like Carbon; Electron Spectroscopy; Transmission Electron Microscopy; X-ray Diffraction |
| ID Code: | 17943 |
| Deposited On: | 17 Nov 2010 13:28 |
| Last Modified: | 04 Jun 2011 09:01 |
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