Bhaumik, Suchandra ; Barua, Asok K. (2003) Growth and characterization of indium tin oxide films grown on polymer substrates by DC magnetron sputtering Japanese Journal of Applied Physics, 42 (6A). pp. 3619-3620. ISSN 0021-4922
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Official URL: http://jjap.ipap.jp/link?JJAP/42/3619/
Related URL: http://dx.doi.org/10.1143/JJAP.42.3619
Abstract
Thin films of indium tin oxide (ITO) have been deposited on unheated polymer substrates by the DC magnetron sputtering technique. The sheet resistance of the films increased with time on exposure to atmosphere for stretched and cast acrylic substrates which was not seen in the case of polycarbonate substrate. The scanning electron microscopy studies carried out on these films corroborated the result. The transmission of the films was ~80% in the visible region for all the films. The X-ray diffraction pattern in all the three cases showed preferred orientation of In2O3 in the (440) planes.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to Japan Socity of Applied Physics. |
| Keywords: | Indium Tin Oxide; DC Magnetron Sputtering; Polymer Substrates; Scanning Electron Microscopy (SEM); Sheet Resistance; Transmittance |
| ID Code: | 1631 |
| Deposited On: | 05 Oct 2010 12:10 |
| Last Modified: | 13 May 2011 09:23 |
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