Indefinite admittance matrix of a five-layer thin-film integrated structure

Kamal, A. K. ; Ahmed, K. U. (1974) Indefinite admittance matrix of a five-layer thin-film integrated structure Microelectronics and Reliability, 13 (3). pp. 229-232. ISSN 0026-2714

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Official URL: http://dx.doi.org/10.1016/0026-2714(74)90323-0

Related URL: http://dx.doi.org/10.1016/0026-2714(74)90323-0

Abstract

The advent of integrated electronic devices has aroused keen interest in the study of the properties of multilayer thin-film structure. A variety of network functions may be derived from the indefinite admittance matrix of a multiterminal multilayer structure. With the objective in view, the indefinite admittance matrix of a five-layer structure (consisting of three resistive layers separated from one another by two dielectric layers) governed by a second-order linear differential equation is evaluated taking into account the parasitic capacitances invariably present among the constituent layers.

Item Type:Article
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ID Code:15855
Deposited On:13 Nov 2010 12:25
Last Modified:03 Jun 2011 05:25

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