Theoretical analysis of planar bulk-acoustic-wave response

Elias, E. ; Jhunjhunwala, A. (1990) Theoretical analysis of planar bulk-acoustic-wave response IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 37 (1). pp. 2-12. ISSN 0885-3010

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Official URL: http://dx.doi.org/10.1109/58.46960

Related URL: http://dx.doi.org/10.1109/58.46960

Abstract

A detailed theoretical analysis for planar bulk-acoustic-wave (BAW) devices that results in a method for computing the bulk-acoustic-wave response for any orientation of any piezoelectric substrate is presented. The BAW responses for four devices is computed and are found to be in excellent agreement with published experimental results. The theory is used to optimize one of these devices by varying the thickness and interdigital transducer (IDT) separation so as to give minimum insertion loss. A similar optimization can be performed for other devices. The theory is also used to find a new BAW device with low insertion loss.

Item Type:Article
Source:Copyright of this article belongs to Institute of Electrical and Electronic Engineers.
ID Code:14066
Deposited On:12 Nov 2010 14:42
Last Modified:03 Jun 2011 12:07

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