Roy, Maitreyee ; Cooper, Ian ; Moore, Peter ; Sheppard, Colin ; Hariharan, Parameswaran (2005) White-light interference microscopy: effects of multiple reflections within a surface film Optics Express, 13 (1). pp. 164-170. ISSN 1094-4087
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Official URL: http://www.opticsinfobase.org/oe/abstract.cfm?URI=...
Related URL: http://dx.doi.org/10.1364/OPEX.13.000164
Abstract
The effects of the presence of a transparent thin film on a test surface in white-light interferometric surface profiling are investigated. An expression is obtained for the output intensity variations in a Michelson interferometer which includes the effect of multiple reflections within the thin film. The number of reflections that need to be considered to obtain good convergence to the correct solution is discussed.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to Optical Society of America. |
| ID Code: | 13941 |
| Deposited On: | 12 Nov 2010 14:26 |
| Last Modified: | 16 May 2016 23:00 |
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