Debnath, Sanjit K. ; Kothiyal, Mahendra P. ; Schmit, Joanna ; Hariharan, Parameswaran (2006) Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates Optics Express, 14 (11). pp. 4662-4667. ISSN 1094-4087
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Official URL: http://www.opticsinfobase.org/abstract.cfm?URI=OE-...
Related URL: http://dx.doi.org/10.1364/OE.14.004662
Abstract
We describe how spectrally-resolved white-light phase-shifting interference microscopy with a windowed 8-step algorithm can be used for rapid and accurate measurements of the thickness profile of transparent thin film layers with a wide range of thicknesses deposited upon patterned structures exhibiting steps and discontinuities. An advantage of this technique is that it can be implemented with readily available hardware.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to Optical Society of America. |
| ID Code: | 12643 |
| Deposited On: | 13 Nov 2010 13:30 |
| Last Modified: | 16 May 2016 21:56 |
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