Hariharan, Parameswaran (2000) Phase-shifting interferometry: minimization of systematic errors Optical Engineering, 39 (4). pp. 967-969. ISSN 0091-3286
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Official URL: http://link.aip.org/link/%3FOPEGAR/39/967/1
Related URL: http://dx.doi.org/10.1117/1.602443
Abstract
Phase-shifting interferometry is now used widely to map the deviations of optical surfaces from a reference plane or reference sphere. However, the accuracy of such measurements is limited by systematic errors due to several causes. These systematic errors can be minimized by a simple averaging technique.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to International Society for Optical Engineering. |
| ID Code: | 12593 |
| Deposited On: | 12 Nov 2010 15:42 |
| Last Modified: | 12 Nov 2010 15:42 |
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