Hariharan, Parameswaran ; Pryputniewicz, Emily J. ; Pryputniewicz, Ryszard J. (2000) Minimization of systematic errors in phase-shifting interferometry: evaluation of residuals Proceedings of SPIE, 4101 . pp. 63-71. ISSN 0277-786X
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Official URL: http://link.aip.org/link/?PSISDG/4101/63/1
Related URL: http://dx.doi.org/10.1117/12.498384
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| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to The International Society for Optical Engineering. |
| ID Code: | 12592 |
| Deposited On: | 12 Nov 2010 15:42 |
| Last Modified: | 02 Nov 2011 12:50 |
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