Phase-shifting interferometry: measurements with high-reflectance surfaces

Hariharan, Parameswaran (2002) Phase-shifting interferometry: measurements with high-reflectance surfaces Optical Engineering, 41 (4). pp. 856-859. ISSN 0091-3286

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Official URL: http://link.aip.org/link/?OPEGAR/41/856/1

Related URL: http://dx.doi.org/10.1117/1.1457461

Abstract

With a phase-shifting Fizeau interferometer, problems arise in making accurate measurements of nominally flat optical surfaces with high-reflectance coatings. We describe a simple technique that can be used to make accurate measurements of such surfaces.

Item Type:Article
Source:Copyright of this article belongs to International Society for Optical Engineering.
ID Code:12591
Deposited On:12 Nov 2010 15:42
Last Modified:12 Nov 2010 15:42

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