Schmit, Joanna ; Hariharan, Parameswaran (2006) Two-wavelength interferometric profilometry with a phase-step error-compensating algorithm Optical Engineering, 45 (11). 115602_1-115602_3. ISSN 0091-3286
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Official URL: http://link.aip.org/link/?OPEGAR/45/115602/1
Related URL: http://dx.doi.org/10.1117/1.2387882
Abstract
We show how an eight-step algorithm with a high tolerance for phase-shift miscalibration can be used with a conventional Mirau interferometer, with only minor modifications to the software, for two-wavelength interferometric profilometry of surfaces exhibiting steps and discontinuities.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to International Society for Optical Engineering. |
| ID Code: | 12588 |
| Deposited On: | 12 Nov 2010 15:42 |
| Last Modified: | 16 Feb 2011 05:34 |
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