New TCE-matched glass-ceramic multi-chip module. I. Electrical design and characterization

Pence, W. E. ; Krusius, J. P. ; Subrahmanyan, R. ; Li, C. Y. ; Carrier, G. ; Francis, G .L. ; Paisley, R. J. ; Holleran, L. M. (1989) New TCE-matched glass-ceramic multi-chip module. I. Electrical design and characterization In: 39th Proceedings of Electronic Components Conference, 1989, 22-24 May 1969, Houston, TX, USA.

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Official URL: https://ieeexplore.ieee.org/document/77819/

Related URL: http://dx.doi.org/10.1109/ECC.1989.77819

Abstract

A glass-ceramic multichip packaging technology for high-I/O-count, large-area silicon chips is discussed. The module substrate material is a new glass-ceramic (Corning 9641), which can be TCE (Thermal Coefficient of Expansion) matched to silicon (3.4 p.p.m.°C). This material possesses a low dielectric constant.

Item Type:Conference or Workshop Item (Paper)
Source:Copyright of this article belongs to Institute of Electrical and Electronics Engineers.
ID Code:114390
Deposited On:22 May 2018 06:40
Last Modified:22 May 2018 06:40

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