Microstrip resonator using sputtered Y1Ba2Cu3O7-delta film on (100) MgO

Pinto, R. ; Apte, P. R. ; Gupta, L. C. ; Vijayaraghavan, R. ; Easwar, K. ; Sarkar, B. K. (1991) Microstrip resonator using sputtered Y1Ba2Cu3O7-delta film on (100) MgO Superconductor Science and Technology, 4 (11). pp. 577-578. ISSN 0953-2048

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Official URL: http://iopscience.iop.org/0953-2048/4/11/005

Related URL: http://dx.doi.org/10.1088/0953-2048/4/11/005


The design, development and measurement of an X-band microstrip resonator fabricated using a sputtered Y1Ba2Cu3O7-delta thin film are presented. The films were grown in situ at 700 degrees C in a hollow cylindrical magnetron sputtering system. The resonator is a capacitive-gap coupled two-port transmission-type resonator in a microstrip configuration. The measurements were carried out in the temperature range 30 K to 300 K using a closed cycle He cryocooler. The resonator patterns on the sputtered Y1Ba2Cu3O7-delta film were generated using conventional photolithography and wet-etch process. Microwave surface resistance values obtained for the above resonator are compared with those of conventional gold resonators.

Item Type:Article
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ID Code:11304
Deposited On:09 Nov 2010 03:36
Last Modified:02 Jun 2011 06:19

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